Vacuum Pump Bearings

Vacuum pump bearings are engineered as the core component to achieve ultra-hign wacuum environments and stable operation. The design exceeds the limits of conventional bearings, tailored for extreme conditions:
●Micron-Level Precision: Precision machining and dynamic balancing ensure rotor vibration below 0.05mm at ultra-hign speeds (>=15,000 RPM), preventing micro-leakage in vacuum chambers;
●Hign-Temperature & Hign-Speed Resistance: Hybrid ceramic materials and silicon nitride rollers withstand continuous temperatures above 200°C, tripling lubrication lifespan;
●Longevity Under Heavy Loads: Optimized raceway curvature and preload design double axial/radial load capacity, achieving over 20,000 hours of service life in semiconductor coating applications.

Precision Bearings for Demanding Vacuum Applications

LILY Bearings are trusted by global leaders in vacuum technology, including ​Edwards, ​Busch, and ​Ebara, to deliver unmatched reliability in critical pump systems.

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✔️ Werkstoffe ✔️ Dichtungen ✔️ Abmessungen
15+ years of OEM expertise ensures:
●Ultra-high vacuum (UHV) reliability
●Chemische Beständigkeit
●Low heat & torque
Contact our engineers to discuss your specs
Dry Vacuum Pumps — Clean and oil-free for long-lasting durability
Vacuum 1

Vacuum 2
Teilenummer Bohrungsdurchmesser Außen-Ø Breite Kugelmaterial Dichtungstyp Schmierung Käfigmaterial Anwendung
C211HY1 55mm 100mm 21mm Siliziumnitrid(HIP) Einseitig Geschirmt, Einseitig Gedichtet Fluorinated Lubricants SPCC Edwards Dry Vacuum Pump IH Series 1800/1000/600
VCMP209ASP 36.5mm 85mm 19mm Siliziumnitrid(HIP) Einseitig Geschirmt, Einseitig Gedichtet Fluorinated Lubricants SPCC Edwards Dry Vacuum Pump IH Series / GXS Series
AB5058TY 12mm 14mm 15mm Siliziumnitrid(HIP) Einseitig Geschirmt, Einseitig Gedichtet Fluorinated Lubricants SPCC Alcatel A100L/103 Rear End, EBARA Motor End
VCMP114 45mm 110mm 19mm Siliziumnitrid(HIP) Einseitig Geschirmt, Einseitig Gedichtet Fluorinated Lubricants SPCC Edwards Dry Vacuum Pump IXH/IH Series
C206SY7
SCB1216		 30mm 62mm 16mm Siliziumnitrid(HIP) Einseitig Geschirmt, Einseitig Gedichtet Fluorinated Lubricants SPCC Edwards Dry Vacuum Pump IH600/IQDP40/80 Series
VCMP 6007 35mm 62mm 14mm Siliziumnitrid(HIP) Offen Fluorinated Lubricants SPCC /
NU209 45mm 85mm 19mm Siliziumnitrid(HIP) / Fluorinated Lubricants Messing /
NU211 55mm 100mm 21mm Siliziumnitrid(HIP) / Fluorinated Lubricants Messing /
VCMP 6207 35mm 72mm 17mm Siliziumnitrid(HIP) Offen Fluorinated Lubricants SPCC Hanbell Roots Pump Free End
3307 35mm 80mm 34.9mm Siliziumnitrid(HIP) / Fluorinated Lubricants SPCC Hanbell Roots Pump Fixed End
VCMP212 45mm 110mm 22mm Siliziumnitrid(HIP) Einseitig Geschirmt, Einseitig Gedichtet Fluorinated Lubricants SPCC Edwards Dry Vacuum Pump IXH/GXS Series
VCMP 6211 C3 55mm 100mm 21mm Siliziumnitrid(HIP) Offen Fluorinated Lubricants SPCC /
7210ADB 50mm 90mm 20mm Siliziumnitrid(HIP) Offen Fluorinated Lubricants SPCC Kashiyama SDL3600 Fixed End

Core value

Designed for oil-free vacuum environments to avoid oil contamination sensitive scenarios (e.g. semiconductor, pharmaceutical equipment).

Points for Use

●Dust sealing: dry pumps are mostly used in dusty environments, check bearing seals regularly for deterioration (visual inspection every 500 hours is recommended);
●Lubrication compatibility: use only solid lubricants (e.g. molybdenum disulfide) or specified dry grease to avoid oil mist contamination of the vacuum chamber;
●Overheating warning: bearings need to be shut down for troubleshooting when the temperature rise is >80°C. Common causes are lubrication failure or rotor imbalance.

Adaptation Scenario

●Laboratory small vacuum system
●3D printing powder handling equipment
●Food packaging machinery
Turbomolecular Pumps — Extreme speed, ultra-high vacuum
Vacuum 3

Vacuum 4
Teilenummer Bohrungsdurchmesser Außen-Ø Breite Kugelmaterial Dichtungstyp Schmierung Käfigmaterial Anwendung
7003 17mm 35mm 9.85mm Siliziumnitrid(HIP) Offen High-Temperature Greases / Magnetic Levitation Molecular Pump Lower Protective End Bearing
C104HY17 22mm 42mm 12mm Siliziumnitrid(HIP) Offen High-Temperature Greases Phenolic Resin Mechanical Molecular Pump Upper/Lower Ends

Core value

Supports ultra-high speed rotation of molecular pump rotors (typically ≥60,000 RPM) to achieve 10-⁸ Pa class ultra-high vacuum.

Points for Use

●Dynamic balance calibration: dbearings need to be calibrated with a dynamic balancer after replacement (allowable residual vibration <0.01mm), otherwise it is easy to trigger resonance and damage the blades;
●Vacuum-compatible materials: only ceramic bearings or vacuum-coated steel bearings are used; outgassing of ordinary bearings will contaminate the vacuum level;
●Pre-tensioning force adjustment: the installation needs to be locked according to the manual torque, too tight leads to too fast temperature rise, too loose reduces the axial bearing capacity.

Adaptation Scenario

●Electron Microscope & Mass Spectrometer
●Vacuum Coaters & Ion Implantation Equipment
●Vacuum testing of aerospace components
Maintenance FAQ
question circle“How can I tell if a bearing needs to be replaced?”
question answerDry pumps: listen to abnormal noise (metal friction sound), measure vibration (acceleration value >4m/s² needs to be replaced);
Molecular pumps: vacuum drop of more than 20% or abnormally high starting current.
question circle“What tools do I need to replace bearings myself?”
question answerBasic tools: bearing puller, torque wrench (molecular pumps need to be accurate to 0.1N-m), dust-free gloves;
Advanced needs: dynamic balancer (required for molecular pumps), vacuum grease (specified models only).
question circle“Bearing life estimate?”
question answerDry pumps: 3,000-5,000 hours (depending on dust load);
Molecular pumps: 10,000-15,000 hours (30% longer at constant temperature up to 25°C).
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